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Tantalum Ethoxide (CAS: 6074-84-6): Properties, Applications, and Safety

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Introduction

Tantalum Ethoxide, with the chemical formula Ta(OC₂H₅)₅, is an organometallic compound used in various high-tech applications. It is a tantalum-based alkoxide known for its role in thin-film deposition, electronic materials, and catalysis. This article explores the properties, applications, and safety considerations of Tantalum Ethoxide.

Chemical and Physical Properties

Molecular Formula and Structure

Chemical Formula: Ta(OC₂H₅)₅
Molecular Weight: Approximately 364.27 g/mol
Appearance: Colorless to pale yellow liquid
Boiling Point: Decomposes before boiling
Solubility: Soluble in organic solvents such as ethanol and toluene

Key Characteristics

– Highly reactive with moisture
– Used as a precursor in chemical vapor deposition (CVD) and atomic layer deposition (ALD)
– Thermally unstable, requiring careful handling

Applications

Electronics and Semiconductor Industry

Tantalum Ethoxide is widely used in the semiconductor industry, particularly in thin-film deposition techniques like CVD and ALD. These processes help create tantalum oxide coatings, which are essential for:
– High-k dielectrics in capacitors
– Gate oxides in transistors
– Protective layers in integrated circuits

Optical Coatings

Tantalum Ethoxide is a key precursor for tantalum pentoxide (Ta₂O₅), a material with excellent optical properties. It is commonly used in:
– Anti-reflective coatings
– High-refractive-index optical films
– Waveguides in photonics

Catalysis and Chemical Synthesis

Tantalum-based alkoxides, including Tantalum Ethoxide, are employed as catalysts in organic synthesis and polymerization reactions. Their role in advanced material synthesis makes them valuable in research and industrial applications.

Safety and Handling

Hazards

Moisture Sensitivity: Reacts with water to form tantalum oxides and ethanol
Flammability: Organic alkoxides can be combustible
Health Risks: Can cause irritation to skin, eyes, and respiratory tract

Safe Handling Practices

– Store in a dry, inert atmosphere to prevent moisture exposure
– Handle in a fume hood with appropriate personal protective equipment (PPE)
– Use non-reactive containers, as it can degrade in the presence of moisture or acids

Conclusion

Tantalum Ethoxide (CAS: 6074-84-6) is a crucial precursor in advanced materials science, particularly in the semiconductor, optical, and catalytic industries. Its high reactivity and specific applications make it indispensable in modern technology, though proper handling and safety measures are essential. As research continues, new uses for this versatile compound are likely to emerge, further expanding its role in cutting-edge material development.

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